Atomic layer deposited nanolaminates of zirconium oxide and manganese oxide from manganese(III)acetylacetonate and ozone
نویسندگان
چکیده
Atomic layer deposition method was used to grow thin films consisting of ZrO2 and MnOx layers. All depositions were carried out at 300 oC. Some characteristics the manganese(III)acetylacetonate ozone process investigated, such as crystallinity dependence growth rate on temperature. partly crystalline in their as-deposited state. Zirconium oxide contained cubic tetragonal phases ZrO2, while manganese shown consist Mn2O3 Mn3O4 phases. exhibited nonlinear saturative magnetization with hysteresis, well resistive switching characteristics.
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ژورنال
عنوان ژورنال: Nanotechnology
سال: 2021
ISSN: ['1361-6528', '0957-4484']
DOI: https://doi.org/10.1088/1361-6528/abfee9